To deal with the contradiction between accuracy and time consuming, a model of reliability analysis of CFT was proposed based on the response surface and nonlinear finite element method, And Initial geometric imperfection was induced by consistent mode imperfection method.The reliability index and sensitivity coefficients of CFT high piers were invested by the proposed model.The effects of slenderness, eccentricity and diameterthickness ratio on reliability index of concretefilled tube high piers were studied by parameter analysis method.Meanwhile, the influence of geometric nonlinearity was also analyzed and the reliability of CFT high pier could be affected by factors mentioned above.Based on the analysis, several suggestions for improving the reliability of CFT high piers were proposed.