Study on Field Emission Array Integrated Vacuum Micro Electron Tactile Sensor

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Study on Field Emission Array Integrated Vacuum Micro Electron Tactile Sensor
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                        10.11835/j.issn.1000-582X.1998.04.001
                    
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温志渝,何清义,江永清,林鹏,蒋子平.真空微电子触觉传感器场致发射阵列的研究[J].重庆大学学报,1998,21(4):

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