A new analysis method for machining surface profile error is presented in this paper.The linear regression and nonlinear regression are first applied respectively,and then the Weierstrass Mandebrot fractal function is used to obtain the fractal parameters of machining profiles.A minimal parameter set which depicts the machining surface geometric precision is set up,and the surface profile can be reconstructed using these parameters,and an analysis method for part performance and its tolerance structure is proposed.Examples are provided to illustrate the method is feasible and effective.