Study On The Prediction Of Tensile/Compressive Internal Stress In CVD Diamond Films

Home > Archive>Volume 22, Issue 3, 1999 >112-116. DOI:10.11835/j.issn.1000-582X.1999.03.021

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Study On The Prediction Of Tensile/Compressive Internal Stress In CVD Diamond Films
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                        10.11835/j.issn.1000-582X.1999.03.021
                    
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方亮王万录. CVD金刚石薄膜中内应力张／压性质预测的研究[J].重庆大学学报,1999,22(3):112~116

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