It is difficult to measure the geometric quantity of small parts in finishing, assembling and measuring, because it's easy to break the workpieces' surface and alter their position by means of traditional contact measuring methods.There are some non contact measurers, such as,light feeler pin and interference microscope etc., because of it's high price and strict working conditions,so it's difficult to promote them in widely use. Precision measurement system based on machine vision has the advantages of non contact measuring as well as high performance and low price. Some problems, such as light source, algorithm of edge fitting, auto focusing,are discussed.