Study on the Reduction of Thermocapillary Convection of the Single-crystal Growth of Silicon under Microgravity
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O782 TN304.12

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    Abstract:

    Float-zone method for growth of semi-conductor silicon is considering very promising under microgravity,but the effect of thermocapillary convection induced by surface tension gradient on the crystal quality is quite highlight.In the present work,a nwe method referred to as surface-cut method is suggested to reduce the melt flow.A mathmatical model to describe the thermocapillary convection in a half float-zone with surface-cut is proposed and numerical simulation for the temperature and the flow field under different surface-cut way is conducted using the finite element method.The results show that the effective reduction can be achieved and the flow will be weaked by 70% by proper increase of the surface-cut time.

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李杰 毛科 等.微重力下单晶硅生长中热毛细对流的控制研究[J].重庆大学学报,2002,25(3):97~100

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