ZnO is formed in the course of directed nitriding with Al-Zn alloy, and that the effect of zinc and magnesium on the directed nitriding process is big different. The long fibers which diameter are far less than one micrometer, short bar-like and tetrapod-like zinc oxide is obtained. The three important stages of initial growth kinetic of ZnO approving ZnO have growth mechanism of VS, they are stage of accelerating, linear and parabola, are discovered. Experimental results show that the volatilization of zinc play a very important role in the growth of ZnO,the growth of ZnO is controlled by the diffusion of zinc in the Al-Zn alloy , and the morphologies of ZnO is depend on the saturation level of the vapour.