ZnO:Al Films Prepared by RF Magnetron Sputtering at Room Temperature

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ZnO:Al Films Prepared by RF Magnetron Sputtering at Room Temperature
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黄佳木,董建华,张兴元.室温溅射沉积ZnO:Al薄膜的工艺[J].重庆大学学报,2004,27(4):97~99

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