Dynamic analysis of a new Nano-CMM(Coordinate Measuring Machine with nanometer resolution) structure is introduced,including vibration characteristic analysis and vibration response analysis.The aim is to assess and analyze dynamic accuracy of structure.Modal and harmonic analysis were made by ANSYS software based on establishing equation of vibration,so as to achieve natural frequency and fundamental vibration mode of structure,and also the displacement and stress of structure under nanomotion motor driving.Moreover,the analysis and comparison of rectangular-bridge and arch-bridge are made in order to prove the superiority of dynamic accuracy of the symmetrical-bridge structure.