Nanometer Scale Surface Roughness Measurement Based on AFM

The datum line and mainly three profile height parameters of surface roughness are briefly introduced and the operation principle and system structure of AFM. IPC - 208B with high-resolution, which was successfully developed by Chongqing University, are described in detail, and the emphasis is laid on its application on the nanometer scale surface roughness. Taking stainless steel for example, its micro-structure was observed, and the surface data were analyzed and transacted by special evaluator and the values of three profile height parameters were obtained. Finally the experimental results are briefly analyzed.

Project Supported:

Clc Number:

TH742.9 TG84