FANG Liang
Chongqing University Department of Applied Physics; Key laboratory of Optoelectronic Technology and Systems of the Education Ministry of China, Chongqing 400030, P.R. China；PENG Liping
Chongqing University Department of Applied Physics, Chongqing 400030, P.R. China；YANG Xiaofei
Chongqing University Department of Applied Physics, Chongqing 400030, P.R. China；HUANG Qiuliu
Chongqing University Department of Applied Physics, Chongqing 400030, P.R. China；ZHOU Ke
Chongqing University Department of Applied Physics, Chongqing 400030, P.R. China；WU Fang
Chongqing University Department of Applied Physics, Chongqing 400030, P.R. China；LIU Gaobin
Chongqing University Department of Applied Physics, Chongqing 400030, P.R. China；MA Yong
Department of Applied physics, Chongqing Normal University, Chongqing 400047, P.R. ChinaIndoped ZnO thin films were prepared on glass substrate by RF magnetron sputtering. The result of XRD and AFM shows that the films are polycrystalline with high caxis orientation. The study of gas sensing reveals that the films are sensitive to NO2 and the best sensibility occurs at 273 ℃; the sensibility is concerned with the concentration of NO2 and the film thickness. The ZnO∶In films are more sensitive to the NO2 gas with higher concentration of NO2 and thinner films have a better sensitivity. Exposed to 2×10-5 NO2 at 273 ℃, the 90nm thick film has a sensibility of 16, indicating that ZnO∶In films can be used to measure NO2 with a low concentration.
方亮,彭丽萍,杨小飞,黄秋柳,周科,吴芳,刘高斌,马勇.磁控溅射制备In掺杂ZnO薄膜及NO2气敏特性分析[J].重庆大学学报,2009,32(9):1002~1005
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