In process of the tunnel construction throw New Austrian Tunnelling Method, the result of smoothwall blasting to rock tunnel is not good, there are more and more cavities produced behind the lining. On the basis of engineering project, this paper makes the three-dimensional elastic-plastic analysis throw numerical simulation, discusses the stress-strain behavior of primary support when there is a different size of rectangle cavity behind the lining. In addition the safety factor of tunnel is calculated with cavity based on the strength reduction finit element method. This factor is compared with the factor of health tunnel. The stability of tunnel structure system is estimated through the linear regression analysis between stress of lining and safety factor.