Abstract:The 2D motif method is a surface characterization method promising to separate roughness and waviness from a profile and is adopted by ISO,so is meaningful to extend this method to 3D.Vincent's watershed algorithm is employed for the generation of 3D-motif.A smallest area selecting criteria is proposed for the use of clearing the small motifs which are concerned as noise.As there are no manipulating factors as 2D-method,a multi-scale analysis is employed based on area and depth criteria,the use of depth criteria is to prevent the combination of two adjacent motifs if there is a significant peak on the border of them.Finally the surface of C(100) are analyzed by the presented method,the texture of this surface has been characterized.