Abstract:To solve the issues of low accuracy and limited speed of a micro liquid-delivery system, a novel micro-dispensing mechanism with a large stroke using a piezoelectric actuator was proposed. To compensate the limited stroke of the piezoelectric actuator, hybrid amplification mechanisms were integrated with the designed flexure-based mechanism. Referring to the operation principle of three typical amplification mechanisms, the magnification ratio was derived. Based on Lagrange’s theorem, the stiffness model of the mechanism was established. In addition, the natural frequency of the mechanism was derived. To validate the correctness of the theoretical analysis, simulations were performed via the ANSYS Workbench, demonstrating that the errors of the stiffness model and magnification ratio were 8.5% and 7.2%, respectively. The proposed mechanism provides insights to the design of the high-performance liquid micro delivery system.