Abstract:The performance of driving circuit is very important for the stable and high precision operation of micro piezoelectric ultrasonic motor. Aiming at the low voltage drive and high speed operation requirements of 1mm micro cylindrical piezoelectric ultrasonic motor, a transformer inverter booster push-pull drive circuit based on Digital Signal Processing (DSP) 28335 chip is designed. The circuit uses DSP 28335 chip as the core to generate four Pulse Width Modulation (PWM) waves. After the PWM wave drives the four MOSFET switch tubes in pairwise alternating conduction, the inverter voltage boost and power amplification are carried out through the transformer, and then the sinusoidal wave with the same amplitude and 90° phase difference is obtained after the LC matching circuit filtering to drive the 1mm ultrasonic motor to rotate. The detailed analysis and parameter design of the hardware and software of the drive circuit are made. The simulation and experiment results show that the output voltage of the drive circuit based on DSP 28335 chip can be adjusted in the range of 0-100V, and the frequency can be adjusted in the range of 15kHz-50kHz. The no-load speed of the piezoelectric ultrasonic motor increases linearly with the increase of the excitation voltage, and reaches 480rpm under the action of 22kHz and 50V respectively, which meets the driving requirements of 1mm cylindrical piezoelectric ultrasonic motor.