The Active Neutral Point Clamped (ANPC) three-level circuit topology with hybrid SiC and Si power module is widely used in photovoltaic energy storage systems due to its high efficiency. However, for traditional hybrid SiC/Si power modules, the use of Si devices limits the efficiency improvement, and the introduction of SiC devices may lead to problems such as uneven heat distribution, voltage overshoot and oscillation. To this end, this paper proposes a comprehensive design method that considers power device loss equalization and power module layout parasitic inductance optimization to improve the power module performance of the hybrid SiC/Si ANPC topology. Firstly, the loss model of the power module is established, and the thermal performance is optimized to reduce the junction temperature and chip temperature difference. Secondly, the parasitic inductance model is constructed, and the parasitic inductance is reduced by optimizing the design. Finally, a hybrid SiC/Si power module based on ANPC topology was developed and its electrothermal performance was tested. The experimental results verify the significant advantages of the proposed module in terms of loss, parasitic inductance and heat distribution.