基于超声波的压接型IGBT器件内部接触压力感知建模研究
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1.广东电网有限责任公司电力科学研究院;2.输变电装备技术全国重点实验室;3.电子薄膜与集成器件全国重点实验室

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TM464???????

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中国南方电网有限责任公司科技项目(GDKJXM20222548)


Research on Contact Pressure Measurement Method for PP-IGBT Based on Ultrasonic Technology
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Affiliation:

1.Electric Power Research Institute,Guangdong Power Grid Co,Ltd;2.State Key Laboratory of Power Transmission Equipment Technology;3.State Key Laboratory of Electronic Thin Films and Integrated

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China Southern Power Grid Company Limited Science and Technology Projects

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    摘要:

    针对压接型IGBT器件因生产工艺产生的封装材料高度存在分散性,导致器件内部接触压力分布不均,而现有器件内部接触压力测量为侵入式测量方法不适合器件在线监测的问题,提出一种基于超声波检测技术的压接型IGBT器件接触压力感知建模方法。首先,基于封装材料尺寸建立压接型IGBT器件二维超声仿真模型;其次,利用接触面等效位移研究不同压力下接触界面的超声波信号响应;最后,通过单芯片器件压装试验对仿真结果进行了验证。结果表明,仿真与实验测试结果最大误差约4.35%,且验证了超声反射波幅值随压力增加而逐渐减小的规律。研究成果为超声波检测技术应用于压接型IGBT器件压力分布准确测量提供了依据,对系统运行安全具有重要意义。

    Abstract:

    The contact pressure within PP-IGBT devices is unevenly distributed due to the height tolerance dispersion of the packaging materials during the production process, but the existing contact pressure measurement method is intrusive and difficult to be applied in online state monitoring, a modeling method for contact pressure measurement of PP-IGBT devices based on ultrasonic non-invasive technology is proposed. Firstly, the two-dimensional ultrasonic simulation model of PP-IGBT device is established based on the package material size. Secondly, the ultrasonic response of contact interface under different pressure is studied by using equivalent displacement of contact surface. Finally, the simulation results are verified by a single chip device pressure test. The results show that the maximum error between simulation and experimental results is about 4.35%, and ultrasonic reflection amplitude decreasing with the increase of contact pressure is verified. The research results provide a theory for the application of ultrasonic technology to the accurate measurement of contact pressure distribution within PP-IGBT devices, which is of great significance to the safety of system operation.

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  • 收稿日期:2025-03-14
  • 最后修改日期:2025-05-27
  • 录用日期:2025-06-11
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