离子掺杂PZT薄膜的研究????????????? ???????????????????? 17
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1.重庆大学航空航天学院;2.重庆大学光电工程学院

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TH???????

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国家自然科学基金项目(面上项目,重点项目,重大项目)航天用高功率密度MEMS压电振动俘能方法研究


Research on ion-doped PZT films
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1.School of Aeronautics and Astronautics, Chongqing University;2.School of Optoelectronic Engineering, Chongqing University

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    摘要:

    针对现有PZT薄膜换能效率不够高,性能调控方法单一的瓶颈问题,本文针对PZT薄膜的压电性能不够高的问题,研究引入La3+和Ba2+的A位掺杂对PZT薄膜电学性能的影响并分析掺杂改性机理。通过溶胶凝胶-旋涂法制备锆钛酸铅镧(PLZT)薄膜和锆钛酸铅钡(PBZT)薄膜。并且进一步研究La3+和Ba2+的A位共掺杂对PZT薄膜性能调控影响。对比不同掺杂比生成的PLBZT薄膜的晶体结构与电学性能。结果表明,La3+和Ba2+共掺时能够协同提升薄膜的电学性能,其中2% La3+和2% Ba2+共掺杂时(即P1.06L0.02B0.02ZT)为最佳。相比于PZT薄膜,P1.06L0.02B0.02ZT薄膜的介电常数为1718.3(提升75.23%),压电常数d33为244.1 pC/N(提升39.65%)。

    Abstract:

    To address the bottleneck issues of low energy conversion efficiency and single performance regulation method in existing PZT thin films, this paper focuses on the problem of insufficient piezoelectric performance of PZT thin films and investigates the effects of A-site doping with La3+ and Ba2+ on the electrical properties of PZT thin films, as well as analyzes the doping modification mechanism. Lead lanthanum zirconate titanate (PLZT) thin films and lead barium zirconate titanate (PBZT) thin films were prepared by the sol-gel spin-coating method. Furthermore, the effects of A-site co-doping of La3+ and Ba2+ on the performance regulation of PZT thin films were studied. The crystal structures and electrical properties of PLBZT thin films with different doping ratios were compared. The results show that the co-doping of La3+ and Ba2+ can synergistically improve the electrical properties of the thin films. The optimal performance is achieved with the co-doping of 2% La3+ and 2% Ba2+ (P1.06L0.02B0.02ZT). Compared with the PZT thin film, the dielectric constant ε? of the P1.06L0.02B0.02ZT thin film is 1718.3 (an increase of 75.23%), and the piezoelectric constant d?? is 244.1 pC/N (an increase of 39.65%)..

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  • 收稿日期:2025-06-04
  • 最后修改日期:2025-10-12
  • 录用日期:2025-11-04
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