The characteristics of flow and combustion in micro gas turbine engine with the low Reynolds number and the high Mach number, the high Couette number and the low Biot number, as well as the ultra high duty ratio of combustion in very small space are analyzed, which are remarkably distinguished from those on macro scale. At the meantime, the limitation of traditional dynamic lubrication theory at ultra high speed on micro scale is presented, and the possibility of making the gas bearing to be able to work at ultra high speed by utilizing boundary slip is investigated. Due to the applied prospect of silicon carbide in the field of MEMS especially under high temperature and high strength conditions, the technical process of combining silicon etching with reactive sintering and grinding machining of silicon carbide is put forward so that the miniature machining of silicon carbide for micro gas turbine engine becomes possible.