We developed a finite element method model. An equality heat source was used to thaw metal with an electron beam in numerical analysis. The temperature field was obtained after the metal thawed with electron beam by numerical analysis. The influence of the material thaw depth was analyzed at differing voltages, energy densities, and energy evenness. A thaw depth diagram was obtained where energy evenness is from 0.9 to 1.0, energy density is from 2 J/cm2 to 17 J/cm2, and voltage is from 25 kV to 50 kV. The change rule of material thaw depth was derived which provides a theoretical reference for fine mould machining with electron beams.